Properties of Cr(C,N) hard coatings deposited in Ar&unknown;C 2 H 2 &unknown;N 2 plasma

Author： Cekada M. Macek M. Kek Merl D. Panjan P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 174-179

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