Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma

Author： Itagaki N. Iwata S. Muta K. Yonesu A. Kawakami S. Ishii N. Kawai Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 259-263

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