Pulse mode effects on crystallization temperature of titanium dioxide films in pulse magnetron sputtering

Author： Miyagi T.   Kamei M.   Ogawa T.   Mitsuhashi T.   Yamazaki A.   Sato T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 32-35

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