Gallium arsenide etching using ion beams from hydrogen/methane mixtures

Author: Villalvilla J.M.   Santos C.   Valles-Abarca J.A.   Valles-Abarca J.A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.1, 1996-01, pp. : 39-44

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