Electrical characteristics of Al/a-C:H/n-Si diodes using CH 4 and CH 4 /CF 4 as the gas source

Author: Alves M.A.R.   Braga E.S.   Frejlich J.   Cescato L.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.3, 1996-03, pp. : 225-227

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Abstract