Focused ion beam preparation of inclined planes in semiconductor materials

Author: Khamsehpour B.   Davies S.T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.5, 1996-05, pp. : 451-454

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract