Author: Mansano R.D. Verdonck P. Maciel H.S.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.48, Iss.7, 1997-09, pp. : 677-679
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Wear of single crystal silicon as a function of surface roughness
Wear, Vol. 254, Iss. 9, 2003-05 ,pp. :
Research on Surface Roughness of Acid Etched Silicon Wafers
Materials Science Forum, Vol. 2015, Iss. 815, 2015-05 ,pp. :
Effects of argon and hydrogen plasmas on the surface of silicon
By Umezu I. Kohno K. Aoki K. Kohama Y. Sugimura A. Inada M.
Vacuum, Vol. 66, Iss. 3, 2002-08 ,pp. :
By Weng Lijun Wang Haizhong Feng Dapeng Liu Weimin Xue Qunji
Industrial Lubrication and Tribology, Vol. 60, Iss. 5, 2008-08 ,pp. :