Production of ultrahigh vacuum by helium glow discharge cleaning in an unbaked vacuum chamber

Author: Akaishi K.   Ezaki K.   Motojima O.   Makasuga M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.48, Iss.7, 1997-09, pp. : 767-770

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Abstract