Surface electrical conductivity of Co+-implanted a-SiC : H films

Author： Sealy B.   Gwilliam R.   Shannon J.   Jeynes C.   Angelov C.   Tsvetkova T.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.2, 1998-10, pp. : 281-284

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