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By Ichihara T.   Nakagawa S.   Naoe M.  

Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 715-718

Elsevier

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Plasma diagnosis and low-substrate-temperature deposition of Ba ferrite films in a damage-free sputtering apparatus with mixed gases

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Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. : 543-548

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Free vibration of a FGPM circular plate placed in a uniform magnetic field

By Dai Hong-Liang   Dai Ting   Yang Lei  

Meccanica, Vol. 48, Iss. 10, 2013-12 ,pp. : 2339-2347

Springer Publishing Company

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Advanced sputtering techniques for high rate-, plasma free- deposition and excellent target utility with uniform erosion

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Magnetic field dependence of AlN film properties in dc planar magnetron sputtering with opposed targets

By Tominaga K.   Ao T.   Sato Y.   Mori I.   Kusaka K.   Hanabusa T.  

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