Magnetic field dependence of AlN film properties in dc planar magnetron sputtering with opposed targets

Author： Tominaga K. Ao T. Sato Y. Mori I. Kusaka K. Hanabusa T.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 549-553

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