Composition, chemical bonding and mechanical properties of magnetron sputtered CN x thin films at different substrate bias

Author： Gioti M.   Logothetidis S.   Charitidis C.   Lefakis H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 53-56

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