High non-additive sputtering of silicon as large positive cluster ions under polyatomic ion bombardment

Author: Belykh S.F.   Rasulev U.K.   Samartsev A.V.   Stroev L.V.   Zinoviev A.V.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.56, Iss.4, 2000-03, pp. : 257-262

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract