Temperature dependence of lead loss in r.f. magnetron sputtering of a stoichiometric Pb(Zr,Ti)O 3 target

By Basit N.A.   Hong K.K.   Blachere J.  

Thin Solid Films, Vol. 302, Iss. 1, 1997-06 ,pp. : 155-161

Elsevier

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Yttria-stabilized zirconia thin films grown by r.f. magnetron sputtering from an oxide target

By Tomaszewski H.   Haemers J.   De Roo N.   Denul J.   De Gryse R.  

Thin Solid Films, Vol. 293, Iss. 1, 1997-01 ,pp. : 67-74

Elsevier

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Structure and composition of (Ti, Al)N films prepared by r.f. planar magnetron sputtering using a composite target

By Inoue S.   Uchida H.   Koterazawa K.   Hioki A.   Howson R.P.  

Thin Solid Films, Vol. 271, Iss. 1, 1995-12 ,pp. : 15-18

Elsevier

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Rf magnetron sputtering of polytetrafluoroethylene under various conditions

By Biederman H.   Zeuner M.   Zalman J.   Blkova P.   Slavnska D.   Stelmasuk V.   Boldyreva A.  

Thin Solid Films, Vol. 392, Iss. 2, 2001-07 ,pp. : 208-213

Elsevier

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Thin film deposition by reactive magnetron sputtering: On the influence of target oxidation and its effect on surface properties

By Rohde D.   Kersten H.   Hippler R.   Eggs C.  

Thin Solid Films, Vol. 305, Iss. 1, 1997-08 ,pp. : 164-171

Elsevier

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