Activation of Si implanted in GaAs at high intensity As co-implantation

Author: Akimov A.N.   Vlasukova L.A.   Bumai Y.A.   Gorupa K.S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 491-494

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Abstract