Study of electron field emission and structural properties of nanostructured carbon thin films deposited by hot-filament-assisted reactive sputtering using methane gas

Author： Lee K.-Y.   Fujimoto K.   Ohkura S.   Honda S.   Katayama M.   Hirao T.   Oura K.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 239-243

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