Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH 4 /N 2 atmosphere

Author: Lin H.Y.   Chen Y.C.   Lin C.Y.   Tong Y.P.   Hwa L.G.   Chen K.H.   Chen L.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.416, Iss.1, 2002-09, pp. : 85-91

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Abstract