GaN films deposited by planar magnetron sputtering

Author: Kikuma T.   Tominaga K.   Furutani K.   Kusaka K.   Hanabusa T.   Mukai T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 233-237

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Abstract