Deposition of transparent conductive tin oxide thin films doped with fluorine by PACVD

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Thin Solid Films, Vol. 427, Iss. 1, 2003-03 ,pp. : 208-214

Elsevier

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Modelling and experimental study of an O 2 /Ar/tetramethyltin discharge used for the deposition of transparent conductive thin tin oxide films

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Characterization of transparent and conductive electrodes of indium tin oxide thin films by sequential reactive evaporation

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Highly conductive and highly transparent n-type microcrystalline silicon thin films

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Conductive transparent films deposited by simultaneous sputtering of zinc-oxide and indium-oxide targets

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