Effective electromechanical coupling coefficient (kt 2 ) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film

Author: Takeuchi M.   Yamada H.   Yoshino Y.   Makino T.   Arai S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 463-466

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Abstract