Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays

Author： Suchaneck G.   Lin W.-M.   Koehler R.   Sandner T.   Gerlach G.   Krawietz R.   Pompe W.   Deineka A.   Jastrabik L.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.66, Iss.3, 2002-08, pp. : 473-478

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