Etching characteristics of magnetic materials (Co, Fe, Ni) using CO/NH 3 gas plasma for hardening mask etching

Author: Matsui N.   Mashimo K.   Egami A.   Konishi A.   Okada O.   Tsukada T.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.66, Iss.3, 2002-08, pp. : 479-485

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Abstract