Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering

Author： Messina G.   Santangelo S.   Fanchini G.   Tagliaferro A.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.67, Iss.3, 2002-09, pp. : 537-542

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