Author： Svadkovski I.V. Golosov D.A. Zavatskiy S.M.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.68, Iss.4, 2002-12, pp. : 283-290
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Sputtering of DyFeCo layers with an unbalanced magnetron
By Mergel D. Bentin H. Raasch D.
Thin Solid Films, Vol. 259, Iss. 2, 1995-04 ,pp. :
Access to resources
Recommend
Studies on the optimisation of unbalanced magnetron sputtering cathodes
By Komath M. Mohan Rao G. Mohan S.
Vacuum, Vol. 52, Iss. 3, 1999-03 ,pp. :
Study on chromium oxide synthesized by unbalanced magnetron sputtering
By Wang D.-Y. Lin J.-H. Ho W.-Y.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :
A novel lithium conductor prepared by unbalanced magnetron r.f. sputtering
By Nguyen L.Q. Chen L. Truong V.-V.
Thin Solid Films, Vol. 293, Iss. 1, 1997-01 ,pp. :