Stress development during thin film growth and its modification under ion irradiation

Author： Pienkos T. Gladyszewski L. Proszynski A. Chocyk D. Gladyszewski G. Martin F. Jaouen C. Drouet M. Lamongie B.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.70, Iss.2, 2003-03, pp. : 243-248

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