IBIC Studies of structural defect activity in different polycrystalline silicon material

Author: Borjanovic V.   Jaksic M.   Pastuovic Z.   Pivac B.   Katz E.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.71, Iss.1, 2003-05, pp. : 117-122

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Abstract