Spectroscopic and kinetic ellipsometry studies of hot-wire deposited polycrystalline silicon on glass

Author: van Veenendaal P.A.T.T.   van der Mark G.W.M.   Rath J.K.   Schropp R.E.I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 41-45

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Abstract