Investigation on the structure of TiO 2 films sputtered on alloy substrates

Author: Gu G.-R.   Li Y.A.   Tao Y.C.   He Z.   Li J.J.   Yin H.   Li W.Q.   Zhao Y.-N.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.71, Iss.4, 2003-07, pp. : 487-490

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Abstract