Backscattered electron contrast on cross sections of interfaces and multilayers in the scanning electron microscope

Author: Konkol A.   Booker G.R.   Wilshaw P.R.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.58, Iss.3, 1995-06, pp. : 233-237

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Abstract