Observation of crystal distortions in SiGe/Si superlattice using a new application of large-angle convergent-beam electron diffraction

Author: Atici Y.   Cherns D.  

Publisher: Elsevier

ISSN: 0304-3991

Source: Ultramicroscopy, Vol.58, Iss.3, 1995-06, pp. : 435-440

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Abstract