Analysis of local strain in aluminium interconnects by energy filtered CBED

Author： Kramer S.   Mayer J.   Witt C.   Weickenmeier A.   Ruhle M.  

Publisher： Elsevier

ISSN： 0304-3991

Source： Ultramicroscopy, Vol.81, Iss.3, 2000-04, pp. : 245-262

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