Optical properties of silicon rich silicon oxides obtained by PECVD

Author: Diaz B.   Rodriguez J.A.   Riera M.   Llobera A.   Dominguez C.   Tutor J.  

Publisher: Elsevier

ISSN: 0026-2692

Source: Microelectronics, Vol.35, Iss.1, 2004-01, pp. : 65-67

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Abstract