Effect of heat treatment on the optical and electrical properties of nitrogen-doped silicon samples

Author: Binetti S.   Pizzini S.   Somaschini R.   Le Donne A.   Li D.   Yang D.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 297-304

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Abstract