Redistribution of Er implanted into Si(100): Correlation with implantation induced damage

Author: Chini T.K.   Datta D.P.   Satpati B.   Tanemura M.   Okuyama F.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 477-482

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