Doping level-dependent dry-etch damage in n -type GaN

Author: Lee Ji-Myon   Kim Byung-Il   Park Seong-Ju  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 227-230

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Abstract