Formation of dry etched gratings in GaN and InGaN

Author: Lee J.   Hong J.   Mackenzie J.   Abernathy C.   Pearton S.   Ren F.   Sciortino P.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 290-293

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