Uniformity of deep levels in semi-insulating InP obtained by multiple-step wafer annealing

Author： Kuriyama K. Ushiyama K. Tsunoda T. Uchida M. Yokoyama K.

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.27, Iss.5, 1998-05, pp. : 462-465

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