Strain relaxation mechanisms in Si 1−x Ge x layers grown by solid-phase epitaxy: Influence of the layer composition and growth temperature

Author: Rodríguez A.   Rodríguez T.   Kling A.   Soares J.   Silva M.   Ballesteros C.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.28, Iss.2, 1999-02, pp. : 77-82

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