Mechanisms of strain induced roughening and dislocation multiplication in Si x Ge 1-x thin films

Author: Jesson D.   Chen K.   Pennycook S.   Thundat T.   Warmack R.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.9, 1997-09, pp. : 1039-1047

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