Lateral diffusion effects in AuGe based source-drain contacts to AllnAs/InGaAs/InP doped channel MODFETs

Author: Iliadis A.   Zahurak J.   Neal T.   Masselink W.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.28, Iss.8, 1999-08, pp. : 944-948

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