Simulation of microstructural evolution induced by scanned laser annealing of metallic interconnects

Author: Hau-Riege C.   Hau-Riege S.   Thompson C.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.30, Iss.1, 2001-01, pp. : 11-16

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Abstract