Free electron laser annealing of silocon carbibe

Author: Ohyama Hideaki   Suzuki Toshiji   Nishi Kazuhisa   Mitsuyu Tsuneo   Tomimasu Takio  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 183-186

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Abstract