Effects of Substrate Surface Preparation on Chemical Vapor Deposition Growth of 4H-SiC Epitaxial Layers

Author： Saddow S.E.   Schattner T.E.   Brown J.   Grazulis L.   Mahalingam K.   Landis G.   Bertke R.   Mitchel W.C.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.30, Iss.3, 2001-03, pp. : 228-234

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