Synthesis and characterization of porous polymeric low dielectric constant films

Author： Xu Yuhuan Zheng D. Tsai Yipin Tu K. Zhao Bin Liu Q. Brongo Maureen Ong Chung Choy Chung Sheng George Tung C.

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.30, Iss.4, 2001-04, pp. : 309-313

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