A silicon micromachined shock accelerometer with twin-mass-plate structure

Author： Wang Z.   Zong D.   Lu D.   Xiong B.   Li X.   Wang Y.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.107, Iss.1, 2003-10, pp. : 50-56

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