Mechanical behavior of microfabricated Si/SiO 2 mushroom structures

Author： Saul C.K.   Lepienski C.M.   Cantao M.P.   Schreiner W.H.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.107, Iss.1, 2003-10, pp. : 80-84

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