Fabrication and characterization of torsion-mirror actuators for optical networking applications

Author: Wu W.G.   Li D.C.   Sun W.   Hao Y.L.   Yan G.Z.   Jin S.J.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 175-181

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Abstract