Dose control circuit for digital electrostatic electron-beam array lithography

Author： Durisety Chandra Vijayraghavan Rajagopal Seshan Lakshmipriya Islam Syed Blalock Benjamin

ISSN： 0925-1030

Source： Analog Integrated Circuits and Signal Processing, Vol.48, Iss.2, 2006-08, pp. : 143-150

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