Ion debris mitigation from tin plasma using ambient gas, magnetic field and combined effects

Author： Harilal S.S.   O’Shay B.   Tao Y.   Tillack M.S.  

Publisher： Springer Publishing Company

ISSN： 0946-2171

Source： Applied Physics B, Vol.86, Iss.3, 2007-02, pp. : 547-553

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