Emission spectral-component monitoring and fuzzy-logic control of pulsed-laser-deposition process

Author： Biggers R.R. Jones J.G. Maartense I. Busbee J.D. Dempsey D. Liptak D. Lubbers D. Varanasi C. Mast D.

Publisher： Elsevier

ISSN： 0952-1976

Source： Engineering Applications of Artificial Intelligence, Vol.11, Iss.5, 1998-10, pp. : 627-635

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